@article{paulsen1992observation, author = {Paulsen, Ron}, title = {Observation of near-interface oxide traps with the charge-pumping technique}, year = {1992}, month = {November}, abstract = {In studies of MOS devices with the charge pumping technique, the authors have encountered a low-frequency increase in the charge recombined per cycle, which they attribute to the charging and discharging of traps located within a tunneling distance of the Si-SiO/sub 2/ interface, i.e., near-interface oxide traps. MOS devices subjected to ionizing radiation as well as ultrathin tunnel oxide polysilicon-oxide-nitride-oxide-silicon (SONOS) nonvolatile memory devices possess a high density of near-interface oxide traps. When the charge recombined per cycle is examined as a function of frequency, a breakpoint is observed at a particular frequency with an inverse equivalent to a trap-to-trap tunneling time constant.}, url = {http://approjects.co.za/?big=en-us/research/publication/observation-of-near-interface-oxide-traps-with-the-charge-pumping-technique/}, pages = {627-629}, journal = {IEEE Electron Device Letters}, volume = {13}, number = {12}, }